@article{a0eadc01f41f4c3895f0a40776efc1fc,
title = "TiO2 Thin Films by Atomic Layer Deposition: a Case of Uneven Growth at Low Temperature",
keywords = "growth, oxide, thin film, titanium, growth, oxide, thin film, titanium, growth, oxide, thin film, titanium",
author = "V. Sammelselg and A. Rosental and A. Tarre and L. Niinist{\"o} and K. Heiskanen and K. Ilmonen and L.-S. Johansson and T. Uustare",
year = "1998",
language = "English",
volume = "134",
pages = "78--86",
journal = "Applied Surface Science",
issn = "1873-5584",
publisher = "Elsevier",
}