TiO2 Thin Films by Atomic Layer Deposition: a Case of Uneven Growth at Low Temperature

V. Sammelselg, A. Rosental, A. Tarre, L. Niinistö, K. Heiskanen, K. Ilmonen, L.-S. Johansson, T. Uustare

    Research output: Contribution to journalArticleScientificpeer-review

    85 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)78-86
    JournalApplied Surface Science
    Volume134
    Publication statusPublished - 1998
    MoE publication typeA1 Journal article-refereed

    Keywords

    • growth
    • oxide
    • thin film
    • titanium

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