Time-dependent simulation of Czochralski silicon crystal growth

J. Järvinen, R. Nieminen, T. Tiihonen

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)468-476
JournalJournal of Crystal Growth
Volume180
Publication statusPublished - 1997
MoE publication typeA1 Journal article-refereed

Keywords

  • crystal growth
  • Czochralski silicon
  • simulation

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