Tilted wing induced stress distirbution in epitaxiallateral overgrown GaN

W.M. Chen, P.J. McNally, K. Jacobs, T. Tuomi, J. Kanatharana, D. Lowney, L. Knuuttila, J. Riikonen, J. Toivonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    3 Citations (Scopus)
    Original languageEnglish
    Title of host publicationThe 4th International Conference on Materials for Microelectronics and Nanoengineering ICMMN-4, Espoo, Finland, 10-12 June, 2002
    Pages33-37
    Publication statusPublished - 2002
    MoE publication typeA4 Article in a conference publication

    Keywords

    • semiconductors
    • synchrotron x-ray topography

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