Tilted wing induced stress distirbution in epitaxiallateral overgrown GaN

W.M. Chen; P.J. McNally; K. Jacobs; T. Tuomi; J. Kanatharana; D. Lowney; L. Knuuttila; J. Riikonen; J. Toivonen

Tilted wing induced stress distirbution in epitaxiallateral overgrown GaN

W.M. Chen, P.J. McNally, K. Jacobs, T. Tuomi, J. Kanatharana, D. Lowney, L. Knuuttila, J. Riikonen, J. Toivonen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Original language	English
Title of host publication	The 4th International Conference on Materials for Microelectronics and Nanoengineering ICMMN-4, Espoo, Finland, 10-12 June, 2002
Pages	33-37
Publication status	Published - 2002
MoE publication type	A4 Conference publication

Keywords

semiconductors
synchrotron x-ray topography

Cite this

@inproceedings{3d83464f572f4408a9f740330a190c5a,

title = "Tilted wing induced stress distirbution in epitaxiallateral overgrown GaN",

keywords = "semiconductors, synchrotron x-ray topography, semiconductors, synchrotron x-ray topography, semiconductors, synchrotron x-ray topography",

author = "W.M. Chen and P.J. McNally and K. Jacobs and T. Tuomi and J. Kanatharana and D. Lowney and L. Knuuttila and J. Riikonen and J. Toivonen",

year = "2002",

language = "English",

pages = "33--37",

booktitle = "The 4th International Conference on Materials for Microelectronics and Nanoengineering ICMMN-4, Espoo, Finland, 10-12 June, 2002",

}

Tilted wing induced stress distirbution in epitaxiallateral overgrown GaN. / Chen, W.M.; McNally, P.J.; Jacobs, K. et al.
The 4th International Conference on Materials for Microelectronics and Nanoengineering ICMMN-4, Espoo, Finland, 10-12 June, 2002. 2002. p. 33-37.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Tilted wing induced stress distirbution in epitaxiallateral overgrown GaN

AU - Chen, W.M.

AU - McNally, P.J.

AU - Jacobs, K.

AU - Tuomi, T.

AU - Kanatharana, J.

AU - Lowney, D.

AU - Knuuttila, L.

AU - Riikonen, J.

AU - Toivonen, J.

PY - 2002

Y1 - 2002

KW - semiconductors

KW - synchrotron x-ray topography

KW - semiconductors

KW - synchrotron x-ray topography

KW - semiconductors

KW - synchrotron x-ray topography

M3 - Conference article in proceedings

SP - 33

EP - 37

BT - The 4th International Conference on Materials for Microelectronics and Nanoengineering ICMMN-4, Espoo, Finland, 10-12 June, 2002

ER -