Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry

Kalle Hanhijarvi; Ivan Kassamakov; Juha Aaltonen; Ville Heikkinen; Lauri Sainiemi; Sami Franssila; Edward Haeggstrom

doi:10.1109/TMECH.2012.2235080

Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry

Kalle Hanhijarvi
, Ivan Kassamakov
, Juha Aaltonen
, Ville Heikkinen
, Lauri Sainiemi
, Sami Franssila
, Edward Haeggstrom

Department of Chemistry and Materials Science

Research output: Contribution to journal › Article › Scientific › peer-review

6 Citations (Scopus)

Original language	English
Pages (from-to)	1418-1420
Journal	IEEE/ASME Transactions on Mechatronics
Volume	18
Issue number	4
DOIs	https://doi.org/10.1109/TMECH.2012.2235080
Publication status	Published - 2013
MoE publication type	A1 Journal article-refereed

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10.1109/TMECH.2012.2235080

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@article{c5b103d0dbad48bbb52f45e0f378130d,

title = "Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry",

author = "Kalle Hanhijarvi and Ivan Kassamakov and Juha Aaltonen and Ville Heikkinen and Lauri Sainiemi and Sami Franssila and Edward Haeggstrom",

year = "2013",

doi = "10.1109/TMECH.2012.2235080",

language = "English",

volume = "18",

pages = "1418--1420",

journal = "IEEE/ASME Transactions on Mechatronics",

issn = "1083-4435",

publisher = "IEEE",

number = "4",

}

TY - JOUR

T1 - Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry

AU - Hanhijarvi, Kalle

AU - Kassamakov, Ivan

AU - Aaltonen, Juha

AU - Heikkinen, Ville

AU - Sainiemi, Lauri

AU - Franssila, Sami

AU - Haeggstrom, Edward

PY - 2013

Y1 - 2013

UR - http://dx.doi.org/10.1109/TMECH.2012.2235080

U2 - 10.1109/TMECH.2012.2235080

DO - 10.1109/TMECH.2012.2235080

M3 - Article

SN - 1083-4435

VL - 18

SP - 1418

EP - 1420

JO - IEEE/ASME Transactions on Mechatronics

JF - IEEE/ASME Transactions on Mechatronics

IS - 4

ER -

Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry

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Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry

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