Through-Silicon Stroboscopic Characterization of an Oscillating MEMS Thermal Actuator Using Supercontinuum Interferometry

Kalle Hanhijarvi, Ivan Kassamakov, Juha Aaltonen, Ville Heikkinen, Lauri Sainiemi, Sami Franssila, Edward Haeggstrom

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)1418-1420
JournalIEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume18
Issue number4
DOIs
Publication statusPublished - 2013
MoE publication typeA1 Journal article-refereed

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