Thin films processed by ALE for applications in ACTFEL devices

M. Leskelä, L. Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationSixth International Workshop in Electroluminescence, El Paso, USA, 1992
    Place of PublicationEl Paso, USA
    Publication statusPublished - 1992
    MoE publication typeA4 Article in a conference publication


    • atomic layer epitaxy (ALE)
    • electroluminescence
    • thin films

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