Thin films of MoN, WN, and perfluorinated silane deposited from dimethylamido precursors as contamination resistant coatings on micro-injection mold inserts

V. Miikkulainen; Mika Suvanto; Tapani A. Pakkanen; Samuli Siitonen; P. Karvinen; Markku Kuittinen; Hannu Kisonen

doi:10.1016/j.surfcoat.2008.05.007

Thin films of MoN, WN, and perfluorinated silane deposited from dimethylamido precursors as contamination resistant coatings on micro-injection mold inserts

V. Miikkulainen, Mika Suvanto, Tapani A. Pakkanen, Samuli Siitonen, P. Karvinen, Markku Kuittinen, Hannu Kisonen

Not published at Aalto University

University of Joensuu

Research output: Contribution to journal › Article › Scientific › peer-review

23 Citations (Scopus)

Original language	English
Pages (from-to)	5103-5109
Number of pages	7
Journal	Surface and Coatings Technology
Volume	202
Issue number	21
DOIs	https://doi.org/10.1016/j.surfcoat.2008.05.007
Publication status	Published - 2008
MoE publication type	A1 Journal article-refereed

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10.1016/j.surfcoat.2008.05.007

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Miikkulainen, V., Suvanto, M., Pakkanen, T. A., Siitonen, S., Karvinen, P., Kuittinen, M., & Kisonen, H. (2008). Thin films of MoN, WN, and perfluorinated silane deposited from dimethylamido precursors as contamination resistant coatings on micro-injection mold inserts. Surface and Coatings Technology, 202(21), 5103-5109. https://doi.org/10.1016/j.surfcoat.2008.05.007

@article{96ecb7bc351a406691a7d7e6f6c512e1,

title = "Thin films of MoN, WN, and perfluorinated silane deposited from dimethylamido precursors as contamination resistant coatings on micro-injection mold inserts",

author = "V. Miikkulainen and Mika Suvanto and Pakkanen, {Tapani A.} and Samuli Siitonen and P. Karvinen and Markku Kuittinen and Hannu Kisonen",

year = "2008",

doi = "10.1016/j.surfcoat.2008.05.007",

language = "English",

volume = "202",

pages = "5103--5109",

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Miikkulainen, V, Suvanto, M, Pakkanen, TA, Siitonen, S, Karvinen, P, Kuittinen, M & Kisonen, H 2008, 'Thin films of MoN, WN, and perfluorinated silane deposited from dimethylamido precursors as contamination resistant coatings on micro-injection mold inserts', Surface and Coatings Technology, vol. 202, no. 21, pp. 5103-5109. https://doi.org/10.1016/j.surfcoat.2008.05.007

Thin films of MoN, WN, and perfluorinated silane deposited from dimethylamido precursors as contamination resistant coatings on micro-injection mold inserts. / Miikkulainen, V.; Suvanto, Mika; Pakkanen, Tapani A. et al.
In: Surface and Coatings Technology, Vol. 202, No. 21, 2008, p. 5103-5109.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Thin films of MoN, WN, and perfluorinated silane deposited from dimethylamido precursors as contamination resistant coatings on micro-injection mold inserts

AU - Miikkulainen, V.

AU - Suvanto, Mika

AU - Pakkanen, Tapani A.

AU - Siitonen, Samuli

AU - Karvinen, P.

AU - Kuittinen, Markku

AU - Kisonen, Hannu

PY - 2008

Y1 - 2008

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-46749092450&partnerID=MN8TOARS

U2 - 10.1016/j.surfcoat.2008.05.007

DO - 10.1016/j.surfcoat.2008.05.007

M3 - Article

SN - 0257-8972

VL - 202

SP - 5103

EP - 5109

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

IS - 21

ER -

Thin films of MoN, WN, and perfluorinated silane deposited from dimethylamido precursors as contamination resistant coatings on micro-injection mold inserts

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