@techreport{99f0cc7db8bd43fe9e0c0bf8d66a438d,
title = "Thin films and overlayers by ALE for advanced applications",
keywords = "ale, atomic layer epitaxy, characterization, synthesis, thin film, ale, atomic layer epitaxy, characterization, synthesis, thin film, ale, atomic layer epitaxy, characterization, synthesis, thin film",
author = "M. Kr{\"o}ger and T. Leskel{\"a} and M. Nieminen and L. Niinist{\"o} and E. Nyk{\"a}nen and M. Utriainen",
year = "1996",
language = "English",
series = "17th Estonian Chemistry Days, Tartto, Viro, 19.-20.4.1996",
pages = "p.",
type = "WorkingPaper",
}