Thin film deposition of manganese oxide and lanthanum manganite by the ALE process

O. Nilsen, M. Peussa, H. Fjellvåg, L. Niinistö, A. Kjekshus

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2000
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameThe 197th meeting of Electrochemical Society, Toronto, Canada, May 14-18, 2000


    • atomic layer epitaxy
    • beta-diketonate
    • lanthanum manganite
    • manganese oxide
    • thin film

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