Thin Film Deposition of Lanthanum Manganite Perovskite by the ALE Process

O. Nilsen, M. Peussa, H. Fjellvåg, L. Niinistö, A. Kjekhus

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    42 Citations (Scopus)
    Original languageEnglish
    Title of host publicationALE/ALENET WORKSHOP on Synthesis and Analysis of Atomic and Molecular Surface Structures, Helsinki, June 20.-22., 1999
    Pagesp.
    Publication statusPublished - 1999
    MoE publication typeA4 Article in a conference publication

    Keywords

    • ALE
    • atomic layer epitaxy
    • lathanum manganite
    • perovskite
    • thin film

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