Thin Film Deposition of Lanthanum Manganite Perovskite by ALE Process

O. Nielsen, M. Peussa, H. Fjellvåg, L. Niinistö, A. Kjekshus

    Research output: Contribution to journalArticleScientificpeer-review

    42 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1781-1784
    JournalJournal of Materials Chemistry
    Volume9
    Publication statusPublished - 1999
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ale
    • atomic layer epitaxy
    • lanthanum manganite
    • perovskite
    • thin film

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