Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

M. Laamanen; M. Blomberg; R. L. Puurunen; A. Miranto; H. Kattelus

doi:10.1016/j.sna.2010.02.015

Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

M. Laamanen^*, M. Blomberg, R. L. Puurunen, A. Miranto, H. Kattelus

^*Corresponding author for this work

Not published at Aalto University

VTT Technical Research Centre of Finland

Research output: Contribution to journal › Article › Scientific › peer-review

8 Citations (Scopus)

Abstract

Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350...1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200...2000 nm. First, the refractive indices were determined for Al₂O₃ films prepared with atomic layer deposition (ALD), and amorphous Mo-Si-N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.

Original language	English
Pages (from-to)	210-214
Number of pages	5
Journal	Sensors and Actuators A: Physical
Volume	162
Issue number	2
DOIs	https://doi.org/10.1016/j.sna.2010.02.015
Publication status	Published - Aug 2010
MoE publication type	A1 Journal article-refereed

Keywords

Absorber
Infrared
MEMS
Mo-Si-N
Refractive index
Visible light

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10.1016/j.sna.2010.02.015

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title = "Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra",

abstract = "Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350...1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200...2000 nm. First, the refractive indices were determined for Al2O3 films prepared with atomic layer deposition (ALD), and amorphous Mo-Si-N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.",

keywords = "Absorber, Infrared, MEMS, Mo-Si-N, Refractive index, Visible light",

author = "M. Laamanen and M. Blomberg and Puurunen, {R. L.} and A. Miranto and H. Kattelus",

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AU - Laamanen, M.

AU - Blomberg, M.

AU - Puurunen, R. L.

AU - Miranto, A.

AU - Kattelus, H.

PY - 2010/8

Y1 - 2010/8

N2 - Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350...1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200...2000 nm. First, the refractive indices were determined for Al2O3 films prepared with atomic layer deposition (ALD), and amorphous Mo-Si-N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.

AB - Two thin film absorbers are presented in this paper: one for the visible (VIS) and the near-infrared (NIR) spectra in the wavelength range of 350...1000 nm, the other for the short-wavelength infrared (SWIR) spectrum in the wavelength range of 1200...2000 nm. First, the refractive indices were determined for Al2O3 films prepared with atomic layer deposition (ALD), and amorphous Mo-Si-N films prepared with reactive sputter deposition. The measurements were made by spectroscopic reflectometry, ellipsometry, gonioreflectometry, and double-beam transfer standard spectrometry. The results were utilised in the design of the absorbers. The absorbers were manufactured as well, and they proved to have high absorption over their whole working spectra varying from 93.4% at the minimum to 99.9% at the maximum. The absorbers are applicable, e.g. to MEMS thermopile detectors.

KW - Absorber

KW - Infrared

KW - MEMS

KW - Mo-Si-N

KW - Refractive index

KW - Visible light

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JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 2

ER -

Thin film absorbers for visible, near-infrared, and short-wavelength infrared spectra

Abstract

Keywords

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