Thickness measurement of thin polymer films by total internal reflection Raman and attenuated total reflection infrared spectroscopy

Antti Kivioja, Anna-Stiina Jääskeläinen, Ville Ahtee, Tapani Vuorinen

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)1-9
    JournalVibrational Spectroscopy
    Issue number31
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Attenuated total reflection infrared spectroscopy
    • ellipsometry
    • thickness
    • Thin film
    • Total internal reflection Raman spectroscopy
    • ultra-thin film

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