Thermal carbonization of porous silicon surface by acetylene

Jarno Salonen, Ensio Laine, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    109 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)456-461
    JournalJournal of Applied Physics
    Volume91
    Issue number1
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed

    Keywords

    • carbonization
    • porous silicon
    • PS

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