Thermal and plasma-enhanced atomic layer deposition: the study of and employment in various nanotechnology applications

Physics & Astronomy

• nanotechnology 100%
• atomic layer epitaxy 91%
• nanorods 21%
• masks 12%
• graphene 12%
• nanowires 11%
• membranes 10%
• differential pressure 9%
• porphyrins 9%
• theses 9%
• composite materials 9%
• plains 8%
• organic materials 8%
• plasma etching 8%
• MIS (semiconductors) 8%
• electric potential 7%
• electrical measurement 7%
• ions 6%
• passivity 6%
• absorption spectroscopy 6%
• capacitors 6%
• dyes 6%
• platforms 6%
• aluminum oxides 6%
• capacitance 5%
• physical properties 5%
• solar cells 5%
• fluorescence 5%
• photoluminescence 5%
• room temperature 4%
• silicon 3%
• thin films 3%
• gases 3%
• interactions 2%
• temperature 2%