Thermal and plasma-enhanced atomic layer deposition: the study of and employment in various nanotechnology applications

Christian Alexander Pyymäki Perros

Research output: Thesis › Doctoral Thesis › Collection of Articles

2 results
- Title(descending)

OtaNano - Nanofab
Päivikki Repo (Manager)
School of Electrical Engineering
Facility/equipment: Facility
OtaNano - Nanomicroscopy Center
Jani Seitsonen (Manager)
Department of Applied Physics
Facility/equipment: Facility