Thermal and plasma enhanced atomic layer deposition of SiO2 using commercial silicon precursors

Matti Putkonen, M. Bosund, Oili M. E. Ylivaara, Riikka Puurunen, L. Kilpi, H. Ronkainen, S. Sintonen, S. Ali, H. Lipsanen, Xuwen Liu, Eero Haimi, Simo-Pekka Hannula, Timo Sajavaara, I. Buchanan, E. Karwacki, Mika Vähä-Nissi

Research output: Contribution to journalArticleScientificpeer-review

60 Citations (Scopus)
Original languageEnglish
Pages (from-to)93-98
Number of pages6
JournalThin Solid Films
Publication statusPublished - 2 May 2014
MoE publication typeA1 Journal article-refereed


  • atomic layer deposition
  • batch deposition
  • conformal coating
  • plasma-enhanced atomic layer deposition
  • precursors
  • silicon dioxide

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