The use of a charge-coupled device in measuring the denuded zone in a silicon wafer

E. Yli-Juuti, J. Partanen, E. Prieur, T. Tuomi, K. Simomaa

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationEspoo
    Pages35-36
    Publication statusPublished - 1992
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameOptoelectronics Laboratory, Helsinki University of Technology
    No.TKK-F-C139

    Keywords

    • CCD detector
    • silicon
    • synchrotron X-ray topography

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