The thermal stability of iron precipitation in silicon after internal gettering

Research output: Contribution to journalArticle

Researchers

  • Peng Zhang
  • Hele Väinölä
  • Andrei Istratov
  • Eicke R. Weber

Research units

Details

Original languageEnglish
Pages (from-to)1051-1055
JournalPhysica B: Condensed Matter
Volume340-342
Publication statusPublished - 2003
MoE publication typeA1 Journal article-refereed

    Research areas

  • internal gettering, iron, re-dissolution energy barrier, silicon

ID: 4151613