The thermal stability of iron precipitation in silicon after internal gettering

Peng Zhang, Hele Väinölä, Andrei Istratov, Eicke R. Weber

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)1051-1055
JournalPhysica B: Condensed Matter
Volume340-342
Publication statusPublished - 2003
MoE publication typeA1 Journal article-refereed

Keywords

  • internal gettering
  • iron
  • re-dissolution energy barrier
  • silicon

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