The stability of internal gettering of iron in silicon and its impact on processing simulation

Peng Zhang, Hele Väinölä, Andrei Istratov, Eicke R. Weber

Research output: Contribution to journalArticleScientificpeer-review

Original languageEnglish
Pages (from-to)4324-4326
JournalApplied Physics Letters
Volume83
Issue number21
Publication statusPublished - 2003
MoE publication typeA1 Journal article-refereed

Keywords

  • internal gettering
  • iron

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