The possibilities of ALE in processing of new materials for electronic and optoelectronic devices

L. Niinistö, M. Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationThe Third International Symposium on Atomically Controlled Surfaces and Interfaces, ACSI-3, Raleigh, USA, 12.-14.10.1995
    Place of PublicationRaleigh, North Carolina, USA
    Pagess. 7.01
    Publication statusPublished - 1995
    MoE publication typeA4 Article in a conference publication

    Keywords

    • ale
    • atomic layer epitaxy
    • new materials

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