The influence of gas-surface interaction on gas-film damping in a silicon accelerometer

T. Veijola, H. Kuisma, J. Lahdenperä

    Research output: Contribution to journalArticleScientificpeer-review

    105 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)83-92
    JournalSensors and Actuators A
    Publication statusPublished - 1998
    MoE publication typeA1 Journal article-refereed


    • accelerometer model
    • accommodation coefficient
    • gas-film damping model
    • squeeze-film damping

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