The future of high-K on pure germanium and its importance for Ge CMOS

M. Meuris*, A. Delabie, S. Van Elshocht, S. Kubicek, P. Verheyen, B. De Jaeger, J. Van Steenbergen, G. Winderickx, E. Van Moorhem, R. L. Puurunen, B. Brijs, M. Caymax, T. Conard, O. Richard, W. Vandervorst, C. Zhao, S. De Gendt, T. Schram, T. Chiarella, B. OnsiaI. Teerlinck, M. Houssa, P. W. Mertens, G. Raskin, P. Mijlemans, S. Biesemans, M. M. Heyns

*Corresponding author for this work

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17 Citations (Scopus)

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