The fabrication of silicon nanostructures by focused-ion-beam implantation and TMAH wet etching

Päivi Sievilä, Nikolai Chekurov, Ilkka Tittonen

Research output: Contribution to journalArticleScientificpeer-review

48 Citations (Scopus)
Original languageEnglish
JournalNanotechnology
Volume21
Issue number14
DOIs
Publication statusPublished - 2010
MoE publication typeA1 Journal article-refereed

Keywords

  • FIB implantation
  • nanofabrication
  • TMAH wet etching

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