The Etch Rate Variations of p+Silicon Wafers in Aqueous KOH Solutions as a Function of Processing Conditions

P. Kilpinen, E. Haimi, V.K. Lindroos

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    1 Citation (Scopus)
    Original languageEnglish
    Title of host publicationMaterials Science of Microelectromechanical Systems (MEMS) Devices II
    EditorsArthur H. Heuer Maarten P. de Boer
    Place of PublicationWarrendale, PA, USA
    PublisherMaterials Research Society MRS
    Pages293-298
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication

    Keywords

    • MEMS
    • silicon etching
    • silicon technology

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