Original language | English |
---|---|
Pages (from-to) | 80-86 |
Journal | Nanotechnology |
Issue number | 5 |
Publication status | Published - 1994 |
MoE publication type | A1 Journal article-refereed |
Keywords
- silicon wafers
- stm
Kaj Pischow, J.M. Molarius
Research output: Contribution to journal › Article › Scientific › peer-review
Original language | English |
---|---|
Pages (from-to) | 80-86 |
Journal | Nanotechnology |
Issue number | 5 |
Publication status | Published - 1994 |
MoE publication type | A1 Journal article-refereed |