The Effects of Interfacial Reaction in the Formation of Ohmic Contacts GaAS

V. Fischer, P.H. Holloway, P.E. Viljonen, E.O. Ristolainen, T.W. Haas, W.V. Lampert, J.M. Woodall

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationMRS, Pittsburgh, 1994
    EditorsS.P. Murarka, A. Katz, K.N. Tu, K. Maex
    Pages413-419
    Publication statusPublished - 1994
    MoE publication typeA4 Article in a conference publication

    Keywords

    • GaAs alloys
    • ohmic contact
    • semiconductor
    • SIMS

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