The effect of hydrocarbon chemistry on sputtering in mixed Be-C-H materials

Andrea Elisabet Sand, C. Bjorkas, Kai Henrik Nordlund

Research output: Contribution to journal › Article › Scientific › peer-review

2 Citations (Scopus)

Original language	English
Journal	NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION B: BEAM INTERACTIONS WITH MATERIALS AND ATOMS
DOIs	https://doi.org/10.1016/j.nimb.2012.10.021
Publication status	Published - 15 May 2013
MoE publication type	A1 Journal article-refereed

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title = "The effect of hydrocarbon chemistry on sputtering in mixed Be-C-H materials",

author = "Sand, {Andrea Elisabet} and C. Bjorkas and Nordlund, {Kai Henrik}",

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T1 - The effect of hydrocarbon chemistry on sputtering in mixed Be-C-H materials

AU - Sand, Andrea Elisabet

AU - Bjorkas, C.

AU - Nordlund, Kai Henrik

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JO - NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION B: BEAM INTERACTIONS WITH MATERIALS AND ATOMS

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