The effect of growth parameters on the deposition of CaS thin films by atomic layer epitaxy

J. Rautanen, M. Leskelä, L. Niinistö, E. Nykänen, P. Soininen, M. Utriainen

    Research output: Contribution to journalArticleScientificpeer-review

    27 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)553-558
    JournalApplied Surface Science
    Volume82/83
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic layer epitaxy
    • CaS
    • growth parameters
    • Thin films

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