The effect of growth parameters on the deposition of CaS thin films by atomic layer epitaxy

J. Rautanen, M. Leskelä, L. Niinistö, E. Nykänen, P. Soininen, M. Utriainen

    Research output: Working paperProfessional

    27 Citations (Scopus)
    Original languageEnglish
    Publication statusPublished - 1994
    MoE publication typeD4 Published development or research report or study

    Publication series

    Name3rd international symposium on atomic layer epitaxy and related surface processes, Sendai, Japan, May 25-27, 1994

    Keywords

    • atomic layer epitaxy
    • CaS
    • growth parameters
    • thin films

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