The effect of gaseous SiCl4 on ALE growth of CaS, SrS and SrS:Ce

P. Soininen, L. Niinistö, E. Nykänen, M. Leskelä

    Research output: Contribution to journalArticleScientificpeer-review

    23 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)99-105
    JournalApplied Surface Science
    Volume75
    Publication statusPublished - 1994
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic layer epitaxy (ALE)
    • calcium sulfide
    • strontium sulfide
    • thin films

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