The Effect of Atomic-Layer-Deposited AlN on Near Surface InGaAs/GaAs Structures

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Original languageEnglish
Pages (from-to)1560-1562
JournalPHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS
Volume9
Issue number7
Publication statusPublished - Jul 2012
MoE publication typeA1 Journal article-refereed

ID: 5568854