The Effect of Atomic-Layer-Deposited AlN on Near Surface InGaAs/GaAs Structures

Päivi Mattila, Markus Bosund, Henri Jussila, O Gordyushenkov, Turkka Tuomi, Teppo Huhtio, Harri Lipsanen

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)1560-1562
JournalPHYSICA STATUS SOLIDI C: CURRENT TOPICS IN SOLID STATE PHYSICS
Volume9
Issue number7
DOIs
Publication statusPublished - Jul 2012
MoE publication typeA1 Journal article-refereed

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