The CTE anisotropy of CVD silicon single crystal at elevated temperatures

A.V. Mazur, M. Gasik

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)48-51
    JournalTheory and Practice of Metallurgy
    Volume56
    Issue number1
    Publication statusPublished - 2007
    MoE publication typeA1 Journal article-refereed

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