The atomic layer deposition of neodymium aluminate thin films

Anne Kosola, Matti Putkonen, Lauri Niinistö

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationHelsinki
    Publication statusPublished - 2004
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameAVS Topical Conference on atomic layer deposition (ALD 2004), Helsinki 16.-18.8.2004
    PublisherAmerican Vacuum Society

    Keywords

    • atomic layer deposition
    • neodymium aluminate
    • thin film

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