Textured Strontium Titanate Layers on Platinum by Atomic Layer Deposition

T. Blomberg, J. Anttila, Suvi Haukka, Marko Tuominen, M. Lukosius, Ch. Wenger, T. Saukkonen

    Research output: Contribution to journalArticleScientificpeer-review

    8 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)65356540
    JournalThin Solid Films
    Volume520
    Issue number21
    DOIs
    Publication statusPublished - 2012
    MoE publication typeA1 Journal article-refereed

    Keywords

    • atomic layer deposition
    • electron backscatter diffraction
    • strontium titanate
    • thin film texture
    • transmission electron microscopy

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