Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration

Kristina Bespalova; Glenn Ross; Mervi Paulasto-Kröckel; Abhilash Sebastian Thanniyil; Cyril Karuthedath; Stefan Mertin; Tuomas Pensala

doi:10.1109/IUS46767.2020.9251496

Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration

Kristina Bespalova, Glenn Ross, Mervi Paulasto-Kröckel, Abhilash Sebastian Thanniyil, Cyril Karuthedath, Stefan Mertin, Tuomas Pensala

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Abstract

In this study, Al0.8Sc0.2N multilayer structures phase stability, interfacial quality, and piezoelectric response were tested before and after annealing in wide range of temperatures and times. The thicknesses and sequence of the layers in the structures are a replica of the design used for the fabrication of piezoelectric micromachined ultrasonic transducers (pMUTs). Al, AlSi (1%), Al/Mo, and Mo have been assessed to choose the most reliable top electrode (TE) material for the structures. The piezoresponse of the structure was estimated by measuring the deflection of piezocantilevers as a function of voltage applied over the film. Membrane deflection at resonance frequency for AlScN- and AlN-based pMUTs was simulated in COMSOL Multiphysics. It is found that the structure with Mo TE layer is stable after annealing at 800°C for 300 h and at 1000 °C for 100 h. None of the structures formed any phases at the interface between the electrode layer and AlScN. Membrane deflection for structures with AlScN as piezolayer is almost three times higher as compared to structures with AlN as piezolayer. Moreover, the pMUT membrane deflection increases after annealing of the structure.

Original language	English
Title of host publication	Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020
Publisher	IEEE
Number of pages	4
ISBN (Electronic)	9781728154480
DOIs	https://doi.org/10.1109/IUS46767.2020.9251496
Publication status	Published - 7 Sep 2020
MoE publication type	A4 Article in a conference publication
Event	IEEE International Ultrasonics Symposium - Las Vegas, United States Duration: 7 Sep 2020 → 11 Sep 2020

Publication series

Name	IEEE International Ultrasonics Symposium
Publisher	IEEE
ISSN (Print)	1948-5719
ISSN (Electronic)	1948-5727

Conference

Conference	IEEE International Ultrasonics Symposium
Abbreviated title	IUS
Country/Territory	United States
City	Las Vegas
Period	07/09/2020 → 11/09/2020
Other	Virtual conference

Keywords

Aluminium Scandium Nitride
Annealing
PMUT
Thin-film deposition

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10.1109/IUS46767.2020.9251496

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Bespalova, K., Ross, G., Paulasto-Kröckel, M., Thanniyil, A. S., Karuthedath, C., Mertin, S., & Pensala, T. (2020). Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration. In Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020 [9251496] (IEEE International Ultrasonics Symposium). IEEE. https://doi.org/10.1109/IUS46767.2020.9251496

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abstract = "In this study, Al0.8Sc0.2N multilayer structures phase stability, interfacial quality, and piezoelectric response were tested before and after annealing in wide range of temperatures and times. The thicknesses and sequence of the layers in the structures are a replica of the design used for the fabrication of piezoelectric micromachined ultrasonic transducers (pMUTs). Al, AlSi (1%), Al/Mo, and Mo have been assessed to choose the most reliable top electrode (TE) material for the structures. The piezoresponse of the structure was estimated by measuring the deflection of piezocantilevers as a function of voltage applied over the film. Membrane deflection at resonance frequency for AlScN- and AlN-based pMUTs was simulated in COMSOL Multiphysics. It is found that the structure with Mo TE layer is stable after annealing at 800°C for 300 h and at 1000 °C for 100 h. None of the structures formed any phases at the interface between the electrode layer and AlScN. Membrane deflection for structures with AlScN as piezolayer is almost three times higher as compared to structures with AlN as piezolayer. Moreover, the pMUT membrane deflection increases after annealing of the structure.",

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author = "Kristina Bespalova and Glenn Ross and Mervi Paulasto-Kr{\"o}ckel and Thanniyil, {Abhilash Sebastian} and Cyril Karuthedath and Stefan Mertin and Tuomas Pensala",

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Bespalova, K , Ross, G , Paulasto-Kröckel, M, Thanniyil, AS, Karuthedath, C, Mertin, S & Pensala, T 2020, Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration. in Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020., 9251496, IEEE International Ultrasonics Symposium, IEEE, IEEE International Ultrasonics Symposium, Las Vegas, Nevada, United States, 07/09/2020. https://doi.org/10.1109/IUS46767.2020.9251496

Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration. / Bespalova, Kristina ; Ross, Glenn ; Paulasto-Kröckel, Mervi et al.

Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020. IEEE, 2020. 9251496 (IEEE International Ultrasonics Symposium).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration

AU - Bespalova, Kristina

AU - Ross, Glenn

AU - Paulasto-Kröckel, Mervi

AU - Thanniyil, Abhilash Sebastian

AU - Karuthedath, Cyril

AU - Mertin, Stefan

AU - Pensala, Tuomas

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AB - In this study, Al0.8Sc0.2N multilayer structures phase stability, interfacial quality, and piezoelectric response were tested before and after annealing in wide range of temperatures and times. The thicknesses and sequence of the layers in the structures are a replica of the design used for the fabrication of piezoelectric micromachined ultrasonic transducers (pMUTs). Al, AlSi (1%), Al/Mo, and Mo have been assessed to choose the most reliable top electrode (TE) material for the structures. The piezoresponse of the structure was estimated by measuring the deflection of piezocantilevers as a function of voltage applied over the film. Membrane deflection at resonance frequency for AlScN- and AlN-based pMUTs was simulated in COMSOL Multiphysics. It is found that the structure with Mo TE layer is stable after annealing at 800°C for 300 h and at 1000 °C for 100 h. None of the structures formed any phases at the interface between the electrode layer and AlScN. Membrane deflection for structures with AlScN as piezolayer is almost three times higher as compared to structures with AlN as piezolayer. Moreover, the pMUT membrane deflection increases after annealing of the structure.

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KW - Annealing

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KW - Thin-film deposition

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DO - 10.1109/IUS46767.2020.9251496

M3 - Conference contribution

AN - SCOPUS:85097866413

T3 - IEEE International Ultrasonics Symposium

BT - Proceedings of the IEEE International Ultrasonics Symposium, IUS 2020

PB - IEEE

T2 - IEEE International Ultrasonics Symposium

Y2 - 7 September 2020 through 11 September 2020

ER -

Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration

Abstract

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POSITION-II: A pilot line for the next generation of smart catheters and implants

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Temperature Stability of Electrode/AlScN Multilayer Systems for pMUT Process Integration

Abstract

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Conference

Keywords

Access to Document

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POSITION-II: A pilot line for the next generation of smart catheters and implants

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OtaNano

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