Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

Mika Koskenvuori; V. Kaajakari; T. Mattila; I. Tittonen

doi:10.1109/MEMSYS.2008.4443597

Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

Mika Koskenvuori, V. Kaajakari, T. Mattila, I. Tittonen

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

24 Citations (Scopus)

Original language	English
Title of host publication	IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008
Publisher	IEEE
Pages	1044-1047
ISBN (Print)	978-1-4244-1792-6
DOIs	https://doi.org/10.1109/MEMSYS.2008.4443597
Publication status	Published - 2008
MoE publication type	A4 Conference publication
Event	IEEE International Conference on Micro Electro Mechanical Systems - Tucson, United States Duration: 13 Jan 2008 → 17 Jan 2008 Conference number: 21

Publication series

Name	Proceedings : IEEE micro electro mechanical systems
Publisher	IEEE
ISSN (Print)	1084-6999

Conference

Conference	IEEE International Conference on Micro Electro Mechanical Systems
Abbreviated title	MEMS
Country/Territory	United States
City	Tucson
Period	13/01/2008 → 17/01/2008

Access to Document

10.1109/MEMSYS.2008.4443597

Cite this

Koskenvuori, M., Kaajakari, V., Mattila, T., & Tittonen, I. (2008). Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator. In IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008 (pp. 1044-1047). (Proceedings : IEEE micro electro mechanical systems). IEEE. https://doi.org/10.1109/MEMSYS.2008.4443597

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title = "Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator",

author = "Mika Koskenvuori and V. Kaajakari and T. Mattila and I. Tittonen",

year = "2008",

doi = "10.1109/MEMSYS.2008.4443597",

language = "English",

isbn = " 978-1-4244-1792-6 ",

series = "Proceedings : IEEE micro electro mechanical systems",

publisher = "IEEE",

pages = "1044--1047",

booktitle = "IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008",

address = "United States",

note = "IEEE International Conference on Micro Electro Mechanical Systems, MEMS ; Conference date: 13-01-2008 Through 17-01-2008",

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Koskenvuori, M, Kaajakari, V, Mattila, T & Tittonen, I 2008, Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator. in IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008. Proceedings : IEEE micro electro mechanical systems, IEEE, pp. 1044-1047, IEEE International Conference on Micro Electro Mechanical Systems, Tucson, Arizona, United States, 13/01/2008. https://doi.org/10.1109/MEMSYS.2008.4443597

Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator. / Koskenvuori, Mika; Kaajakari, V.; Mattila, T. et al.
IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008. IEEE, 2008. p. 1044-1047 (Proceedings : IEEE micro electro mechanical systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

AU - Koskenvuori, Mika

AU - Kaajakari, V.

AU - Mattila, T.

AU - Tittonen, I.

N1 - Conference code: 21

PY - 2008

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DO - 10.1109/MEMSYS.2008.4443597

M3 - Conference article in proceedings

SN - 978-1-4244-1792-6

T3 - Proceedings : IEEE micro electro mechanical systems

SP - 1044

EP - 1047

BT - IEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008

PB - IEEE

T2 - IEEE International Conference on Micro Electro Mechanical Systems

Y2 - 13 January 2008 through 17 January 2008

ER -