Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator

Mika Koskenvuori, V. Kaajakari, T. Mattila, I. Tittonen

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    20 Citations (Scopus)
    Original languageEnglish
    Title of host publicationIEEE 21st International Conference on Micro Electro Mechanical Systems MEMS 2008
    PublisherIEEE
    Pages1044-1047
    ISBN (Print) 978-1-4244-1792-6
    DOIs
    Publication statusPublished - 2008
    MoE publication typeA4 Article in a conference publication
    EventIEEE International Conference on Micro Electro Mechanical Systems - Tucson, United States
    Duration: 13 Jan 200817 Jan 2008
    Conference number: 21

    Publication series

    NameProceedings : IEEE micro electro mechanical systems
    PublisherIEEE
    ISSN (Print)1084-6999

    Conference

    ConferenceIEEE International Conference on Micro Electro Mechanical Systems
    Abbreviated titleMEMS
    CountryUnited States
    CityTucson
    Period13/01/200817/01/2008

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