Synthesis, structure, and properties of volatile lanthanide complexes containing amidinate ligands: Application for Er2O3 film growth by atomic layer deposition

Jani Päiväsaari; Charles.L. Dezelah; Dwayne Back; Hani M. El-Kaderi; Mary Jane Heeg; Matti Putkonen; Lauri Niinistö; Charles H. Winter

Synthesis, structure, and properties of volatile lanthanide complexes containing amidinate ligands: Application for Er2O3 film growth by atomic layer deposition

Jani Päiväsaari, Charles.L. Dezelah, Dwayne Back, Hani M. El-Kaderi, Mary Jane Heeg, Matti Putkonen, Lauri Niinistö, Charles H. Winter

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	4224-4233
Journal	Chemistry of Materials
Volume	15
Issue number	39
Publication status	Published - 2005
MoE publication type	A1 Journal article-refereed

Keywords

ALD
precursors
thin films

Cite this

@article{2297d63f57e74301aa1583d25bd4b48e,

title = "Synthesis, structure, and properties of volatile lanthanide complexes containing amidinate ligands: Application for Er2O3 film growth by atomic layer deposition",

keywords = "ALD, precursors, thin films, ALD, precursors, thin films, ALD, precursors, thin films",

author = "Jani P{\"a}iv{\"a}saari and Charles.L. Dezelah and Dwayne Back and El-Kaderi, {Hani M.} and Heeg, {Mary Jane} and Matti Putkonen and Lauri Niinist{\"o} and Winter, {Charles H.}",

year = "2005",

language = "English",

volume = "15",

pages = "4224--4233",

journal = "Chemistry of Materials",

issn = "1520-5002",

publisher = "American Chemical Society",

number = "39",

}

Synthesis, structure, and properties of volatile lanthanide complexes containing amidinate ligands: Application for Er2O3 film growth by atomic layer deposition. / Päiväsaari, Jani; Dezelah, Charles.L.; Back, Dwayne et al.
In: Chemistry of Materials, Vol. 15, No. 39, 2005, p. 4224-4233.

Research output: Contribution to journal › Article › Scientific › peer-review

TY - JOUR

T1 - Synthesis, structure, and properties of volatile lanthanide complexes containing amidinate ligands: Application for Er2O3 film growth by atomic layer deposition

AU - Päiväsaari, Jani

AU - Dezelah, Charles.L.

AU - Back, Dwayne

AU - El-Kaderi, Hani M.

AU - Heeg, Mary Jane

AU - Putkonen, Matti

AU - Niinistö, Lauri

AU - Winter, Charles H.

PY - 2005

Y1 - 2005

KW - ALD

KW - precursors

KW - thin films

KW - ALD

KW - precursors

KW - thin films

KW - ALD

KW - precursors

KW - thin films

UR - http://www.cvd-journal.de

M3 - Article

SN - 1520-5002

VL - 15

SP - 4224

EP - 4233

JO - Chemistry of Materials

JF - Chemistry of Materials

IS - 39

ER -

Synthesis, structure, and properties of volatile lanthanide complexes containing amidinate ligands: Application for Er2O3 film growth by atomic layer deposition

Keywords

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Cite this