Synthesis, structure, and properties of volatile lanthanide complexes containing amidinate ligands: Application for Er2O3 film growth by atomic layer deposition

Jani Päiväsaari, Charles.L. Dezelah, Dwayne Back, Hani M. El-Kaderi, Mary Jane Heeg, Matti Putkonen, Lauri Niinistö, Charles H. Winter

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)4224-4233
    JournalChemistry of Materials
    Volume15
    Issue number39
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • precursors
    • thin films

    Cite this

    Päiväsaari, J., Dezelah, C. L., Back, D., El-Kaderi, H. M., Heeg, M. J., Putkonen, M., Niinistö, L., & Winter, C. H. (2005). Synthesis, structure, and properties of volatile lanthanide complexes containing amidinate ligands: Application for Er2O3 film growth by atomic layer deposition. Chemistry of Materials, 15(39), 4224-4233.