Synthesis, structure, and properties of volatile lanthanide complexes containing amidinate ligands: Application for Er2O3 film growth by atomic layer deposition

Jani Päiväsaari, Charles.L. Dezelah, Dwayne Back, Hani M. El-Kaderi, Mary Jane Heeg, Matti Putkonen, Lauri Niinistö, Charles H. Winter

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)4224-4233
    JournalChemistry of Materials
    Issue number39
    Publication statusPublished - 2005
    MoE publication typeA1 Journal article-refereed


    • ALD
    • precursors
    • thin films

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