@techreport{f4bcb6a9f0bf4d7e9c382d596a5358fc,
title = "Synthesis, structure and atomic layer deposition film growth studies of tris(amidinato)lanthanide(III) precursors",
keywords = "amidinate, atomic layer deposition, precursor, synthesis,, thin films, amidinate, atomic layer deposition, precursor, synthesis,, thin films, amidinate, atomic layer deposition, precursor, synthesis,, thin films",
author = "Dezelah, {Charles H.} and Dwayne Back and H.M. El-Kaderi and M.J. Heeg and Winter, {Charles H.} and Jani P{\"a}iv{\"a}saari and Matti Putkonen and Lauri Niinist{\"o}",
year = "2004",
language = "English",
series = "AVS Topical Conference on atomic layer deposition (ALD 2004)",
publisher = "American Vacuum Society (AVS)",
type = "WorkingPaper",
institution = "American Vacuum Society (AVS)",
}