Synthesis, structure and atomic layer deposition film growth studies of tris(amidinato)lanthanide(III) precursors

Charles H. Dezelah, Dwayne Back, H.M. El-Kaderi, M.J. Heeg, Charles H. Winter, Jani Päiväsaari, Matti Putkonen, Lauri Niinistö

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationHelsinki
    Publication statusPublished - 2004
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameAVS Topical Conference on atomic layer deposition (ALD 2004)
    PublisherAmerican Vacuum Society (AVS)

    Keywords

    • amidinate
    • atomic layer deposition
    • precursor
    • synthesis,
    • thin films

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