Synthesis of oxide thin films and overlayers by atomic layer epitaxy for advanced applicaltions

Research output: Contribution to journalArticleScientificpeer-review

Researchers

  • L. Niinistö
  • M. Ritala
  • M. Leskelä

Research units

Details

Original languageEnglish
Pages (from-to)23-29
JournalMaterials Science and Engineering B
VolumeB41
Publication statusPublished - 1996
MoE publication typeA1 Journal article-refereed

    Research areas

  • ale, atomic layer epitaxy, organometallics, oxide, synthesis, thin film

ID: 4936524