Synthesis of oxide thin films and overlayers by atomic layer epitaxy for advanced applicaltions

L. Niinistö, M. Ritala, M. Leskelä

    Research output: Contribution to journalArticleScientificpeer-review

    152 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)23-29
    JournalMaterials Science and Engineering B
    VolumeB41
    Publication statusPublished - 1996
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ale
    • atomic layer epitaxy
    • organometallics
    • oxide
    • synthesis
    • thin film

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