Synthesis of oxide thin films and overlayers by atomic layer epitaxy for advanced applications

L. Niinistö, M. Ritala, M. Leskelä

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    152 Citations (Scopus)
    Original languageEnglish
    Title of host publication2nd International Symposium on Oxide Electronics, Yokohama, Japani, 14.-15.12.1995
    PublisherTokyo Institute of Technology
    Pagesp. 13
    Publication statusPublished - 1995
    MoE publication typeA4 Article in a conference publication

    Keywords

    • ale
    • atomic layer epitaxy
    • oxide
    • thin films

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