Original language | English |
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Publication status | Published - 2004 |
MoE publication type | D4 Published development or research report or study |
Publication series
Name | Materials for Microelectronics and Nanoengineering 5th International Conference |
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Juha Riikonen, Turkka Tuomi, Aapo Lankinen, Jaakko Sormunen, Antti Säynätjoki, Lauri Knuuttila, Harri Lipsanen, P.J McNally, A. Danilewsky, H. Sipilä, S. Vaijärvi, D. Lumb, A. Owens
Research output: Working paper › Professional
Original language | English |
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Publication status | Published - 2004 |
MoE publication type | D4 Published development or research report or study |
Name | Materials for Microelectronics and Nanoengineering 5th International Conference |
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