Synchrotron X-ray topographic study of Si wafers for advanced 0.25 µm and 0.35 µm CMOS technology

P. McNally, A. Reader, T. Tuomi, P. Herbert, A.N. Danilewsky

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    Original languageEnglish
    Title of host publicationHASYLAB-DESY Annual Report 1995
    Pages679-680
    Publication statusPublished - 1996
    MoE publication typeA3 Part of a book or another research book

    Keywords

    • optoelectronics
    • semiconductors

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