Synchrotron X-ray topographic study of LOCOS device structures on Si wafers for advanced 0.35 µm CMOS technology

P. McNally, J. Curley, A. Reader, T. Tuomi, M. Taskinen, A. Danilewsky, J. Bibus, P. Herbert

    Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

    Original languageEnglish
    Title of host publicationHASYLAB-DESY Annual Report 1995
    Pages691-692
    Publication statusPublished - 1996
    MoE publication typeA3 Part of a book or another research book

    Keywords

    • optoelectronics
    • semiconductors

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