Synchrotron Topograpic Study of Defects in Liquid-encapsulated Czochralski-grown semi-insulating Gallium Arsenide Wafers

E. Prieur, T. Tuomi, J. Partanen, E. Yli-Juuti, M. Tilli

    Research output: Contribution to journalArticleScientificpeer-review

    10 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)599-605
    JournalJournal of Crystal Growth
    Volume132
    Publication statusPublished - 1993
    MoE publication typeA1 Journal article-refereed

    Keywords

    • GaAs
    • synchrotron topography

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