Synchrotron Topographic Study of Czochralski-grown Silicon Wafers for Advanced Memory Circuits

M. Tuominen, T. Tuomi, E. Prieur, J. Partanen, J. Lahtinen, J. Laakkonen

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationGermany
    Pages551-552
    Publication statusPublished - 1994
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameHasylab Jahresbericht 1993
    PublisherHasylab

    Keywords

    • synchrotron x-ray topography, silicon

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